International Conference on Micro- and Nano-Electronics, 2009 (5-9 October 2009, Zvenigorod, Russian Federation)Orlikovskiĭ, Aleksandr Aleksandrovich; Valiev, Kamil′ Akhmetovich.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7521, issn 0277-786X, isbn 978-0-8194-7911-2 0-8194-7911-X, 1Vol, various pagings, isbn 978-0-8194-7911-2 0-8194-7911-XConference Proceedings

Electromechanical energy conversion in the nanometer gapsKOSTSOV, E. G.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70251G.1-70251G.8, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Graphene nanoelectronics : electrostatics and kineticsZEBREV, G. I.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70250M.1-70250M.9, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Micro- and nanoelectronics 2007 (1-5 October 2007, Zvenigorod, Russia)Valiev, Kamil Akhmetovich; Orlikovskii, Aleksandr Aleksandrovich.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7, 1 v. (various pagings), isbn 978-0-8194-7238-0 0-8194-7238-7Conference Proceedings

Temperature effect on electron transport in conventional short channel MOSFETs : Monte Carlo simulationZHEVNYAK, Oleg.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70251M.1-70251M.8, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Focused ion beam source of a new type for micro-and nanoelectronics technologiesVARENTSOV, V. L.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 702509.1-702509.12, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Reactive sputtering of metal targets : influence of reactive atoms implantationMARCHENKO, V. A.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70250D.1-70250D.9, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Sign magnetosensitivity of dual-collector lateral bipolar magnetotransistorTIKHONOV, R. D.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70251B.1-70251B.11, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Theoretical study of ionization processes in BF3 plasmaKUDRYA, V. P.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70250C.1-70250C.9, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Micro- and nanoelectronics 2005 (3-7 October 2005, Zvenigorod, Russia)Valiev, Kamil A; Orlikovsky, Alexander A.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6325-6, 1Vol, pagination multiple, isbn 0-8194-6325-6Conference Proceedings

Quantum informatics 2005 (3-7 October 2005, Moscow, Russia)Ozhigov, Yuri I.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6329-9, 1Vol, pagination multiple, isbn 0-8194-6329-9Conference Proceedings

Features of evolution of implanted profiles during RTA in non-isothermal reactorRUDAKOV, Valery I; VICTOROV, Alexander A; DENISENKO, Yuri I et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 702519.1-702519.12, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Langmuir probe applications in monitoring of plasma etchingMIAKONKIKH, Andrey V; RUDENKO, Konstantin V; ORLIKOVSKY, Alexander A et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70250F.1-70250F.10, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Micro-scale domain structure formation by e-beam point writing on the Y cut surfaces of LiTaO3 crystalsKOKHANCHIK, L. S; PUNEGOV, D. V.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70250J.1-70250J.8, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Modeling of Powerful GaAs MESFETSHESTAKOV, A; MYASNIKOV, A; ZHURAVLEV, K et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70251N.1-70251N.8, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Non-volatile electrically reprogrammable memory matrix on self-forming conducting nanostructures with an integrated transistor electric decoupling of cellsMORDVINTSEV, Victor M; KUDRJAVTSEV, Sergey E; LEVIN, Valeriy L et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70251D.1-70251D.8, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

A new model for the copper CMP kineticsGOLDSTEIN, R; MAKHVILADZE, T; SARYCHEV, M et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70251Q.1-70251Q.10, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

A plane wave diffraction on a pin-hole in a film with a finite thickness and real electrodynamic propertiesCHKHALO, Nikolay I; DOROFEEV, Illarion A; SALASHCHENKO, Nikolay N et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 702507.1-702507.7, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Correction of the EUV mirror substrate shape by ion beamCHKHALO, N; PARAMONOV, L; PESTOV, A et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 702503.1-702503.4, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Method of creation of monomolecular transistor with overhanging electrodesSAPKOV, I. V; SOLDATOV, E. S; ELENSKY, V. G et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70250P.1-70250P.8, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Modeling of Vertical Transistor with Electrically Variable Junctions in ISE TCADROGOZHIN, A. E; KHORIN, I. A; DROZDOV, D. G et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70251O.1-70251O.9, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Simulation, fabrication and dynamics characteristics of electrostatically actuated switchesPOSTNIKOV, A. V; AMIROV, I. I; NAUMOV, V. V et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70251H.1-70251H.8, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Stable silicon resistors at 20-160°C due to divacancy involving in high purity neutron doped SiKAMAEV, Gennady N; EFREMOV, Mikhail D; STUCHINSKY, Victor A et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70251A.1-70251A.9, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Divergence Instability of an Extensible Microplate Subjected to nonlinear Electrostatic PressureREZAZADEH, Ghader; YAGUBIZADE, Hadi; ALIZADEH, Yashar et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70251F.1-70251F.11, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper

Effects of spatial reproduction at the interference of the electron waves in semiconductor ID nanostructures with parabolic quantum wellsPETROV, V. A; NIKITIN, A. V.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7025, pp 70250O.1-70250O.9, issn 0277-786X, isbn 978-0-8194-7238-0 0-8194-7238-7Conference Paper